MEMS Labs are capable of advancing collaboration research among centers and departments with the expectation that all the instruments are used effectively. Main facilities include: Double side mask aligner, spin coater, electronbeam evaporator. RF/DC sputter, alpha- step, gold/ aluminum wire bonder, oven, acid/alkaline/organic etching bath, optical microscope, ultrasonic oscillator, heating pad, etc.
Yuan Ze University - Department of Mechanical Engineering
