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雙面對準曝光機
放置位置_en:R3007
管理者_en:徐瑞培
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射頻直流濺鍍機
放置位置_en:R3007
管理者_en:徐瑞培
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電子束蒸鍍機_en
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原子力顯微鏡
放置位置_en:R3006
管理者_en:沈炳臣
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可見光分光光譜儀
放置位置_en:R3006
管理者_en:沈炳臣
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都卜勒測振儀與控制器
放置位置_en:R3006
管理者_en:沈炳臣
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CNC铣床
放置位置_en:機械工場
管理者_en:徐瑞培
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光學觀測模組
放置位置_en:R3013
管理者_en:郭良吉
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雙面對準曝光機_en
放置位置_en:精密儀器中心_en
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光罩圖形轉移之曝光機。_en
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